Electron microscope

Details Electron microscope Electron microscope

1988-10-11

1990-05-01

Hannaher, Constantine

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

2503272, 250397, H01J 37147, H01J 3726

Patent

active

049220985

ABSTRACT:
An electron microscope has a two-dimensional sensor located at the image-formation plane. The two-dimensional sensor stores electron beam energy and emits light upon exposure to light or heat. The filament is located at a position displaced from the principal optical axis of the electron beam so that the image of the filament may not be recorded on the two-dimensional sensor. The two-dimensional sensor is, for example, made of stimulable phosphor.

REFERENCES:
patent: 3857035 (1974-12-01), Miller
patent: 3859527 (1975-01-01), Luckey
patent: 4206349 (1980-06-01), Kamimura
patent: 4426583 (1984-01-01), Chang et al.
patent: 4485304 (1984-11-01), Teraoka et al.

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