Electron microscope

Details Electron microscope Electron microscope

1990-12-20

1992-09-01

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 250311, H01J 3707

Patent

active

051441292

ABSTRACT:
An electron microscope comprising an electron gun for generating an electron beam, an irradiation lens system for irradiating a specimen with the electron beam, means for obtaining an image signal of the specimen, a frame memory for storing the image signal, means for obtaining a total accumulation function, which indicates the sum total of accumulated values in a plurality of one-dimensional directions, and in which each of the accumulated values in the plurality of one-dimensional directions indicates accumulation with respect to a frequency of a function obtained by applying one-dimensional Fourier transform to a function obtained by projecting two-dimensional intensity distribution of said image signal in corresponding one-dimensional direction thereof, and means for obtaining a substantial extreme point of the total accumulation function.

REFERENCES:
patent: 4695725 (1987-09-01), Mori et al.
patent: 4803358 (1989-02-01), Kato et al.
patent: 4818873 (1989-04-01), Herriot

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