Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1978-11-30
1980-06-03
Dixon, Harold A.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250398, G01M 2300
Patent
active
042063493
ABSTRACT:
An electron microscope comprising an electron gun for generating an electron beam, an electron lens system for irradiating a specimen with the electron beam, an electron lens system for magnifying an electronic image transmitted through the specimen, a fluorescent plate arranged removably in the path of the magnified electron image for converting the magnified transmitted electron image into a visual image, a viewing window for observing the visual image, a CRT display unit for displaying data related to the transmitted electron image, which is arranged at a position where the data is visible from the viewing window, and an optical system for projecting the data on a photo-sensitive material which is exposed to the transmitted electron image.
REFERENCES:
patent: 3514595 (1970-05-01), Schwarz et al.
patent: 3835246 (1974-09-01), Muller et al.
Dixon Harold A.
Hitachi , Ltd.
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