Electron microscope

Details Electron microscope Electron microscope

1996-02-27

1998-09-29

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250357, H01J 37244

Patent

active

058148140

ABSTRACT:
An electron microscope has an electron gun for emitting an electron beam, a specimen holder for holding a specimen thereon, and a deflection coil for applying the electron beam from the electron gun to the specimen on the specimen holder. A controller produces a differential signal representing the difference between a signal from a vibration sensor which detects vibrations of the electron gun and a signal from another vibration sensor which detects vibrations of the specimen holder. The differential signal is added to a deflection signal for the deflection coil for thereby effecting feedforward control of the electron beam to cause the electron beam to reach the specimen on the specimen holder, irrespective of the vibrations of the electron gun and the specimen holder.

REFERENCES:
patent: 4767973 (1988-08-01), Jacobsen et al.
patent: 4929874 (1990-05-01), Mizuno et al.
patent: 4948971 (1990-08-01), Vogen et al.
patent: 5000415 (1991-03-01), Sandercock
patent: 5049745 (1991-09-01), Vogen et al.
patent: 5523576 (1996-06-01), Koike et al.

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