Electron microscope

Details Electron microscope Electron microscope

1977-09-01

1980-02-19

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, 250492R, G01M 2300

Patent

active

041896416

ABSTRACT:
An electron beam emitted from an electron beam source is applied to a sample and when it produces an magnified image of the sample on a fluorescent plate, the amount of the electron beam is detected. When the accumulation of the electron beam radiation reaches a predetermined value with lapse of the time, the beam density on the surface of the sample is so controlled as to be reduced to zero or below a certain preset level, whereby the sample is prevented from damage due to excessive exposure to the electron beam.

REFERENCES:
patent: 3137791 (1964-06-01), Gutter
patent: 3221133 (1965-11-01), Kazato et al.
patent: 3283120 (1966-11-01), Spruck
patent: 3547074 (1970-12-01), Hirschfeld
patent: 3711711 (1973-01-01), Dao et al.
patent: 3737617 (1973-06-01), Llop et al.
patent: 3757120 (1973-09-01), Muller et al.
patent: 3838313 (1974-09-01), Anderson
patent: 4045669 (1977-08-01), Kamimura et al.

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