Electron microscope

Details Electron microscope Electron microscope

1988-08-03

1991-02-05

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250397, H01J 3726

Patent

active

049907760

ABSTRACT:
An auto-focusing electron microscope used for the observation, measurement and/or checking of a circuit pattern or the like comprises an objective lens capable of changing a focal position of an electron beam, an optical system for projecting a light and shade pattern having a light-permeable portion and a light-shielding portion onto the surface of a specimen through the objective lens, and a detector for detecting the projected pattern while optically reflecting it, whereby focusing can be made while reducing any damage and/or charging of the specimen.

REFERENCES:
patent: 4115802 (1978-09-01), Kramer et al.
patent: 4407008 (1983-09-01), Schmidt et al.
patent: 4440475 (1984-04-01), Colliaux
patent: 4537477 (1985-08-01), Takagi et al.
patent: 4564296 (1986-01-01), Oshida et al.
patent: 4725722 (1988-02-01), Maeda et al.
Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, 1981, pp. 14 and 17.

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