Electron/ion microscope with improved resolution

Details Electron/ion microscope with improved resolution Electron/ion microscope with improved resolution

1994-12-27

1996-03-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250311, H01J 3726

Patent

active

055005276

ABSTRACT:
A new type of electron microscope comprises a charged particle source and a condensor that form a dark-field illumination system with an incident beam of a small spatial coherence width compared to the transverse dimensions of the specimen. An interferometer is positioned along a direction of scattering to produce the superposition of two lateral areas of the scattered beam to form interference and to vary the amount of shear. The microscope includes a rotation means for turning the direction of shearing relative to the scattered beam around the scattering direction. The interference fringes are recorded by a detector at different directions of shear with variable amount of shear within each shear direction. A data processor (digital computer) evaluates the visibility and the phase shift of the interference fringes to obtain Fourier components of an image of the specimen and to synthesize the image from those components. Aberrations of this microscope can be substantially reduced and its numerical aperture increased, resulting in a higher resolving power.

REFERENCES:
patent: 3847689 (1974-11-01), Fletcher et al.
patent: 3889114 (1975-06-01), Jan Van Oosyum
patent: 4935625 (1990-06-01), Hasegawa et al.
patent: 5192867 (1993-03-01), Osakase et al.
patent: 5298747 (1994-03-01), Ichikawa et al.

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