Electron image projector

Details Electron image projector Electron image projector

1988-10-21

1990-02-20

Tarcza, Thomas H.

Electric lamp and discharge devices: systems

Cathode ray tube circuits

With secondary emission stage in the cathode-ray tube

250213VT, H01J 2941, H01J 3150

Patent

active

049029304

ABSTRACT:
An electron image projector for transferring mask patterns onto a semiconductor wafer comprises a patterned photo-emissive cathode mask (1) and a target (3) such as a semiconductor wafer (11) coated with an electron sensitive resist (10). Accelerated by a uniform electric field E and focussed by a uniform magnetic field H a patterned electron beam is projected from the cathode onto the target with unity magnification. The electric field E is at least mainly established between the cathode and the target A foil is provided for protecting the photocathode against poisoning by gas liberated from the target upon electron beam bombardement. To avoid adversely influencing the imaging electron beams the foil may be constituted as a metal foil with a thickness of about 0,1 .mu.m for 25 kV electrons.

REFERENCES:
patent: 3378714 (1968-04-01), Guyot et al.

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