Electron holography apparatus

Details Electron holography apparatus Electron holography apparatus

1988-08-30

1990-06-19

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250311, H01J 3726

Patent

active

049356259

ABSTRACT:
An electron holography apparatus includes an electron microscope which is provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams, and further includes an image detector for detecting an electron interference fringe pattern which varies in accordance with the phase difference between the first and second electron beams, as a picture image, and an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data.

REFERENCES:
patent: 4109996 (1978-08-01), Ersoy
patent: 4532422 (1985-07-01), Nomura et al.
patent: 4748132 (1988-05-01), Fukuzawa et al.
"Significance of Electronmagnetic Potentials in the Quantum Theory", Aharonov et al., The Physical Review, vol. 115, No. 3, pp. 485-491, Aug. '59.
"Quantitative Phase Analysis in Electron Holographics Interferometry", Yatasai et al., Applied Optics, vol. 26, No. 2, Jan. 1987, pp. 377-382.
"Interference Electron Microscopy by Means of Holography", Endo et al., Jap. Journ. of Applied Physics, vol. 8, No. 12, Dec. 1979, pp. 2291-2294.
Applications of Electron Holography, by Akira Tonomura.

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