Electron gun

Details Electron gun Electron gun

1974-03-22

1976-01-13

Lawrence, James W.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 328233, G01N 2300

Patent

active

039327493

ABSTRACT:
Electron gun having a source of electrons, means for forming the electrons into a beam directed along an axis, and an output electrode comprising a plurality of semi-cylindrical plates disposed coaxially of the axis of the beam. This electrode is part of the final lens of the gun, and voltages for deflecting the beam and correcting astigmatism are superposed on the plates of this electrode.

REFERENCES:
patent: 3191028 (1965-06-01), Crewe
patent: 3597608 (1971-08-01), Gutter
patent: 3597609 (1971-08-01), Anger et al.
patent: 3644733 (1972-02-01), Wolff et al.
patent: 3787696 (1974-01-01), Dao et al.
patent: 3801784 (1974-04-01), Wittry

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