Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-01-11
2005-01-11
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S492100, C250S492200, C250S492300
Reexamination Certificate
active
06841777
ABSTRACT:
An electron source particularly for a RHEED measurement system or a RHEED measurement system as such includes an electron emitter (5), a first deflection stage (6a, b) for radiating an electron beam onto a sample (1), and a second deflection stage between the first stage (6a, b) and the sample1, preferably near the sample.
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Rijnders et al., “In situ monitoring during pulsed laser deposition of complex oxides using reflection high energy electron diffraction under high oxygen pressure,”Appl. Phys. Lett., vol. 70, No. 14, pps. 1888-1890 (Apr. 7, 1997).
Caesar Rivise Bernstein Cohen & Pokotilow Ltd.
Lee John R.
Souw Bernard E.
Staib Instruments GmbH
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