Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1988-10-14
1990-01-30
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250397, H01J 37244
Patent
active
048975451
ABSTRACT:
An improved gaseous detector device for an environmental scanning electron microscope (ESEM) is provided. The detector device includes a generally annular electrode assembly having an inner electron detector formed of a thin ring, an intermediate electron detector positioned radially outwardly of the inner electron detector which is formed of a first plurality of concentric arc segments, and an outer electron detector positioned radially outwardly of the intermediate electron detector which is formed of a second plurality of concentric arc segments. The first plurality of concentric arc segments is positioned generally normal to the second plurality of concentric arc segments to obtain a directional topographic contrast. The inner, intermediate and outer electron detectors are aligned along generally the same horizontal plane.
REFERENCES:
patent: Re27005 (1970-12-01), Wingfield et al.
patent: 3612859 (1971-10-01), Schumacher
patent: 4596928 (1986-06-01), Danilatos
patent: 4596929 (1986-06-01), Coates et al.
patent: 4720633 (1988-01-01), Nelson
patent: 4794259 (1988-12-01), Sanderson et al.
Danilatos et al., Scanning, vol. 2, 1979, pp. 72-82.
Danilatos, "A Gaseous Detector Device for an Environmental SEM", Micron and Microscopa Acta 14(4), pp. 307-318 (1983).
Danilatos, "Design and Construction of an Atmospheric or Environmental SEM", (Part 3), Scanning, vol. 7, 26-42 (1985).
Danilatos, G. D., "Improvements on the Gaseous Detector Device", G. D. Bailey, Ed., Proceedings of the 44th Annual Meeting of the Electron Microscopy of America, pp. 630-631 (1986).
Danilatos, G. D., "ESEM--A Multipurpose Surface Electron Microscope," G. W. Bailey, Ed., Proceedings of the 44th Annual Meeting of the Electron Microscopy Society of America, pp. 632-633 (1986).
Danilatos, G. D. et al., "Principles of Scanning Electron Microscopy at High Specimen Chamber Pressures," Scanning, vol. No. 2, 1979, pp. 72-82.
Berman Jack I.
Electro-Scan Corporation
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