Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1984-10-18
1987-04-14
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250305, H01J 3726
Patent
active
046581375
ABSTRACT:
Electron detector apparatus and method for detecting secondary electrons released from a body, of particular utility in testing integrated circuits in an operational state. The apparatus utilizes a magnetic lens having an axis of symmetry, for producing a magnetic field that progressively weakens along the axis, so that the secondary electrons travel through the magnetic lens in progressively elongated helical paths and approach an electron retarding means, for example a planar grid, at approach angles to the direction of the axis such that their approach speeds along the axis are substantially equal to their actual speeds. The secondary electrons are collected after passage through the retarding means. Alternatively, the secondary electrons may be directed through a magnetic lens having an axis of symmetry to focus them at a small region at one end of the lens on which a part spherical electron retarding electrode is centered, such that the focussed secondary electrons proceed along radial paths to the retarding electrode, such that their approach speeds are substantially equal to their actual speeds.
REFERENCES:
patent: 3474245 (1969-10-01), Kimura et al.
patent: 3717761 (1973-02-01), Koike et al.
patent: 3760180 (1973-09-01), Weber
patent: 3822382 (1974-07-01), Koike
patent: 4442355 (1984-04-01), Tamura et al.
patent: 4514682 (1985-04-01), Feurbaum
Garth Simon C. J.
Nixon William C.
Anderson Bruce C.
Guss Paul A.
Merrett N. Rhys
Sharp Mel
Texas Instruments Incorporated
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