Electron cyclotron resonance equipment with variable flare...

Details Electron cyclotron resonance equipment with variable flare... Electron cyclotron resonance equipment with variable flare...

2004-12-09

2008-08-12

Hassanzadeh, Parviz (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

C156S345460, C118S7230MW

Reexamination Certificate

active

07410552

ABSTRACT:
An electron cyclotron resonance equipment generates plasma by application of a processing gas and microwave energy into a vacuum chamber having a wafer therein in an environment of reduced pressure. The equipment includes a horn antenna assembly mounted onto an uppermost end of the vacuum chamber for radiating the microwave energy supplied from a high-frequency generator into the vacuum chamber. The horn antenna enables extension and retraction in a lengthwise direction to change a flare angle of the horn antenna. The equipment is provided with a fixed antenna and a plurality of mobile antennas to configure a horn antenna assembly, thereby enabling control of the flare angle in the horn antenna as a result of displacement of the mobile antennas. Thus, the uniformity in radiation of the microwave energy within plasma chamber can be controlled with efficiency.

REFERENCES:
patent: 5228052 (1993-07-01), Kikuchi et al.
patent: 5389153 (1995-02-01), Paranjpe et al.
patent: 5520771 (1996-05-01), Kanai et al.
patent: 5869802 (1999-02-01), Spencer et al.
patent: 5888414 (1999-03-01), Collins et al.
patent: 6087614 (2000-07-01), Ishizuka et al.
patent: 6311638 (2001-11-01), Ishii et al.
patent: 6646224 (2003-11-01), Ishii et al.
patent: 05-295544 (1993-09-01), None

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