Electron beam testing device for stroboscopic measurement of hig

Details Electron beam testing device for stroboscopic measurement of hig Electron beam testing device for stroboscopic measurement of hig

1981-07-20

1984-12-04

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 3728

Patent

active

044866607

ABSTRACT:
An electron beam testing device is disclosed for stroboscopic measurement of high-frequency periodic events in a measuring object. A scanning electron beam microscope is employed with a beam suppression system. A detector senses secondary electrons emitted from the measuring object. A boxcar integrator is provided having an internal gate circuit, phase control circuit and signal processing circuit. A delay is inserted between the phase control circuit and gate circuit so as to delay activation of the gate circuit in accordance with a transit time of electron means emanating from the scanning electron microscope.

REFERENCES:
patent: 3535516 (1970-10-01), Munakata
patent: 3628012 (1971-12-01), Plows et al.
Hosokawa et al., "Gigaherz Stroboscopy . . . ", Rev. Sci. Instrum., 49(9), Sep. 1978, pp. 1293-1299.
Feuerbaum et al., "Signal Processing . . . ", Microcircuit Engineering, 1981.
"IEEE J. of Solid-State Circuits", vol. SC-14, No. 2, Apr. 1979, pp. 471-481, Article entitled Electron-Beam Testing Of VLSI Circuits", by Wolfgang et al.
"Beam Chopper for Subnanosecond Pulses in Scanning Electron Microscopy", Feuerbaum et al., J. Phys. E: Sci. Instrum., vol. 11, 1978, pp. 529-532.
"On-Wafer Defect Classification of LSI-Circuits Using a Modified SEM", Fazekas et al., Scanning Electron Microscopy, 1978, vol. 1, pp. 754 and 801-806.
Digital Circuit Testers publication of Hewlett-Packard Microprocessor Lab, Model 5036A.
Princeton Applied Research Operating and Service Manual, Model 162 Boxcar Integrator, 1976.

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