Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-12-19
2006-12-19
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
Reexamination Certificate
active
07151258
ABSTRACT:
To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing section32for storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section5, an approximate coordinate measuring section28for obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section4, an image correcting section30for correcting the stereo image according to the tilt angle created by the sample tilting section5based on the shape or coordinate values of the sample obtained in the approximate coordinate measuring section28using a correction factor stored in the correction factor storing section32, and a precise coordinate measuring section34for obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring section28based on a corrected stereo image obtained in the image correcting section30.
REFERENCES:
patent: 2004/0264764 (2004-12-01), Kochi et al.
patent: 2002-270126 (2002-09-01), None
patent: 2002-270127 (2002-09-01), None
patent: 2002-351844 (2002-12-01), None
K. Ebihara, “Medical and Biological Electron Microscope Observation Method,” Japanese Society of Electron Microscopy, Jan. 20, 1982 (4th edition Aug. 20, 1988), pp. 278-299.
Kochi Nobuo
Koike Hirotami
Okada Shin-ichi
Tsuruga Yasuko
Foley & Lardner LLP
Nguyen Kiet T.
Topcon Corporation
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