Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2006-06-27
2006-06-27
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S310000
Reexamination Certificate
active
07067808
ABSTRACT:
This invention provides an electron beam measuring device capable of performing three-dimensional image measurement of a sample with high precision, irrespective of the tilt angle and height of the sample, by adjusting an electron optical system of a scanning charged-particle beam device so as to be suitable for image measurement. The electron beam measuring device includes a measuring section20adapted to tilt a reference template held by a sample holder3and an irradiated electron beam7relative to each other by means of a sample tilting section5, to find the shape or coordinate values of the reference template based on a stereo image photographed by an electron beam detecting section4, a calibration data preparing section30for comparing the measuring results at the measuring section20with known reference data to prepare calibration data for a stereo image photographed by the electron beam measuring device, and a calibration section40for performing a calibration based on the calibration data so as to reduce aberration in an image of the sample detected by the electron beam detecting section4. Based on the stereo image calibrated by the calibration section40, the shape or coordinate values of the sample9are found.
REFERENCES:
patent: 2004/0264764 (2004-12-01), Kochi et al.
patent: 2005/0061972 (2005-03-01), Kochi et al.
patent: 2005/0133718 (2005-06-01), Miyamoto et al.
patent: 2002-270126 (2002-09-01), None
patent: 2002-270127 (2002-09-01), None
K. Ebihara, “Medical and Biological Electron Microscope Observation Method,” Japanese Society of Electron Microscopy, Jan. 20, 1982 (4thedition: Aug. 20, 1988), pp. 278-299.
Aoki Hiroyuki
Kochi Nobuo
Foley & Lardner LLP
Smith II Johnnie L
Topcon Corporation
Wells Nikita
LandOfFree
Electron beam system and electron beam measuring and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electron beam system and electron beam measuring and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam system and electron beam measuring and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3665827