Electron beam scenario simulator and method of testing a sensor

Details Electron beam scenario simulator and method of testing a sensor Electron beam scenario simulator and method of testing a sensor

1990-10-22

1992-01-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504941, 2504951, H01J 146

Patent

active

050794310

ABSTRACT:
A simulator and method of testing a sensor wherein an electron gun mounted n a vacuum chamber directs a stream of electronic onto a target plate made up of a heat sink backing sheet and a heat insulating coating sheet adhered to the backing layer to form small hot spots on the coating sheet. The target plate may be a sheet of copper to which is adhered a coating layer of glass or a sheet of aluminum to which is adhered a coating layer of aluminum oxide. Infrared radiation from the hot spots is collimated and passed through an optical system which forms an image of the hot spots on the sensor to be tested.

REFERENCES:
patent: 4572958 (1986-02-01), Durand et al.
patent: 4999502 (1991-03-01), Midavaine
patent: 5012112 (1991-04-01), Flint et al.

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