Electron beam scanning device

Details Electron beam scanning device Electron beam scanning device

1983-09-22

1985-10-15

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, G01N 2300

Patent

active

045476691

ABSTRACT:
A converging lens system of the electron beam scanning device incorporates a condenser lens (or lenses), an objective lens and an aperture means being capable of changing the aperture diameter so as to produce an electron beam spot on a specimen and vary the electron beam current on the specimen. The optimum aperture diameter is determined based on the designated electron beam current and the accelerating voltage of the electron beam by means of a data processor, so that the minimum diameter of the electron beam is formed on the specimen.

REFERENCES:
patent: 3560781 (1971-02-01), Riecke
patent: 4210806 (1980-07-01), Broers
patent: 4321510 (1982-03-01), Takigawa
patent: 4424448 (1984-01-01), Takigawa et al.

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