Electron beam scanning apparatus for the structural analysis of

Details Electron beam scanning apparatus for the structural analysis of Electron beam scanning apparatus for the structural analysis of

1975-10-30

1976-11-23

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, G01N 2300, G21K 700, H01K 3726

Patent

active

039939057

ABSTRACT:
In an electron beam scanning apparatus with ray penetration of the specimen, an additional deflection system provided between the specimen and the detector directs the transmitted primary beam always to the same point of the detector. The detector has different zones for separately registering the primary beam portion and the scattered portion, respectively, of the radiation penetrating the specimen.

REFERENCES:
patent: 3857034 (1974-12-01), Hoppe

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