Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1988-09-26
1989-12-12
Michl, Paul R.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430326, 430311, 430942, 430283, G03C 1495
Patent
active
048867349
ABSTRACT:
An insoluble electron beam positive polyimide having the formula ##STR1## can be exposed by an electron beam to render the exposed areas soluble. The exposed areas can then be dissolved using a solvent to leave the pattern which can be used directly as an insulator layer in a semiconductor device.
REFERENCES:
patent: 4414059 (1983-11-01), Blum et al.
patent: 4508749 (1985-04-01), Brannon et al.
patent: 4568322 (1986-02-01), Blum et al.
patent: 4579809 (1986-04-01), Irving
patent: 4612275 (1986-09-01), Gregor
patent: 4655874 (1987-04-01), Marks
Crivello et al., J. Polym. Sci., Polym. Chem. Ed. 1987, 25 3293-3309; "Photodimerization of Maleic Anhydride".
Boule et al., Tetrahedron Letters No. 11, pp. 865-868, 1976; "Synthesis and Characterization of Photo Sensitive Polyimides".
Barltrop et al., Chemical Communications, pp. 882, 823, Nov. 22, 1966; "Photosensitive Protective Groups".
IBM Tech. Disclosure Bulletin, vol. 16, No. 2, Jul. 1973; pp. 601, 602.
IBM Tech. Disclosure Bulletin, vol. 22, No. 6, Nov. 1979; pp. 2254, 2255.
Yoda et al., J. Macromol. Sci-Chem, A21(13 & 14) pp. 1641-1663 (1984); "New Photosensitive High Temperature Polymers for Electronic Application".
Dasheff Andrew N.
Kaufman Frank B.
Moore James A.
International Business Machines - Corporation
Michl Paul R.
Rensselaer Polytechnic Institute
RoDee C. D.
LandOfFree
Electron-beam positive polyimide does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electron-beam positive polyimide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron-beam positive polyimide will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2121334