Radiant energy – Electron energy analysis
Patent
1985-12-11
1988-04-26
Anderson, Bruce C.
Radiant energy
Electron energy analysis
250397, G01B 714, G01B 1500
Patent
active
047406933
ABSTRACT:
Disclosed is an electron beam pattern line width measurement system wherein an electron beam is converged to a fine spot, the electron beam is scanned on a sample formed with a pattern to-be-measured, secondary electrons generated from a surface of the sample by the projection of the electron beam are detected, and the detected signal is processed to determine a line width of the pattern to-be-measured, comprising a secondary electron detector which detects a signal corresponding to an amount of all secondary electrons generated by the scanning, and a secondary electron energy analyzer which selectively detects a signal corresponding to an amount of secondary electrons of specified energy. With the electron beam pattern line width measurement system, it becomes possible to precisely detect a pattern boundary region defined by different sorts of materials in a stepped structure of a small level difference not having been measurable with a prior-art electron beam pattern line width measurement system.
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Ichihashi Mikio
Nakayama Yoshinori
Obayashi Hidehito
Okazaki Shinji
Anderson Bruce C.
Guss Paul A.
Hitachi , Ltd.
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