Electron beam microfabrication apparatus

Details Electron beam microfabrication apparatus Electron beam microfabrication apparatus

1977-07-13

1978-07-25

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250492A, G21K 506

Patent

active

041031687

ABSTRACT:
Electron microscope apparatus for electron beam microfabrication. A mounting is described for supporting at least the final lens assembly of an electron microscope column above the vacuum chamber which also provides a rigid mounting for a stage on which a substrate is located together with reflecting mirrors which co-operate with a laser interferometer system for measuring the distances moved by the stage and therefore the substrate in two orthogonal directions.
To avoid unwanted movement between the mirrors and the interferometer heads, the latter are also carried by rigid support means on the underside of the mounting.
The mounting may comprise a solid ring located in an aperture in the lid of the vacuum chamber.
Alternatively, the mounting may comprise a rigid and reinforced plate forming the lid of the chamber, from the underside of which extend the rigid support means for the stage and interferometer heads. The laser is mounted on a rigid extension of the mounting overhanging the chamber so that alignment is always maintained between all parts of the laser interferometer system.

REFERENCES:
patent: 3648048 (1972-03-01), Cahan et al.
patent: 3887811 (1975-06-01), Livesay
patent: 3900737 (1975-08-01), Collier et al.

Affiliated with

Also associated with

Rating

Electron beam microfabrication apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam microfabrication apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam microfabrication apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1423138