Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1994-10-12
1996-01-09
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
H01J 37252
Patent
active
054830656
ABSTRACT:
In an electron beam microanalyzer which has an electron beam irradiation system for irradiating a surface of a sample in a chamber an with electron beam and an optical microscope capable of observing the sample, an electron beam deflecting coil is provided. The beam is emitted by the electron beam irradiation system in a direction oblique to the sample surface and the electron beam deflecting coil bends the electron beam to align the electron beam to the optical axis of the optical microscope, the optical axis being perpendicular to the sample surface.
REFERENCES:
patent: 3209146 (1965-09-01), Shirai
patent: 4440475 (1984-04-01), Colliaux
patent: 4978855 (1990-12-01), Liebl et al.
patent: 5192866 (1993-03-01), Komi
Sato Masao
Takeuchi Yukio
Berman Jack I.
Seiko Instruments Inc.
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