Electron beam microanalyzer

Details Electron beam microanalyzer Electron beam microanalyzer

1994-10-12

1996-01-09

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 37252

Patent

active

054830656

ABSTRACT:
In an electron beam microanalyzer which has an electron beam irradiation system for irradiating a surface of a sample in a chamber an with electron beam and an optical microscope capable of observing the sample, an electron beam deflecting coil is provided. The beam is emitted by the electron beam irradiation system in a direction oblique to the sample surface and the electron beam deflecting coil bends the electron beam to align the electron beam to the optical axis of the optical microscope, the optical axis being perpendicular to the sample surface.

REFERENCES:
patent: 3209146 (1965-09-01), Shirai
patent: 4440475 (1984-04-01), Colliaux
patent: 4978855 (1990-12-01), Liebl et al.
patent: 5192866 (1993-03-01), Komi

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