Electron beam measuring apparatus

Details Electron beam measuring apparatus Electron beam measuring apparatus

1994-03-23

1995-10-31

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3728

Patent

active

054632218

ABSTRACT:
When an image display unit displays a magnified image of an object being examined, a measuring unit automatically computes the dimensions of the image at the preset position. A tolerance range setting unit has been supplied with an upper and a lower limit value according to which it can judge the dimensions of the object at the preset position to be normal, whereas a comparison-decision unit decides that the dimensions thus computed are held between the upper and lower limit values. When the measured result is found outside the range of upper to lower limit values, the right-or-wrong decision data is stored in a memory and is redisplayed in the form of an image by the image display unit at proper timing.

REFERENCES:
patent: 4600839 (1986-07-01), Ichihashi et al.
patent: 5029250 (1991-07-01), Komatsu et al.
patent: 5051585 (1991-09-01), Koshishiba et al.
patent: 5126566 (1992-06-01), Shimada
patent: 5254854 (1993-10-01), Betzig

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