Electron beam irradiation apparatus

Details Electron beam irradiation apparatus Electron beam irradiation apparatus

1980-06-11

1982-01-12

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250311, 250442, 250400, G01M 2100

Patent

active

043107648

ABSTRACT:
An electron beam irradiation apparatus which comprises: a base plate of a magnetically permeable material; a movable stage mounted on said base plate; an upper magnetic shield plate having an electron beam passage hole disposed above said stage; a side member of high permeability which magnetically interconnects said base plate and said upper shield plate, and; a magnetic shield cover plate which covers the table surface of said stage.

REFERENCES:
patent: 3218457 (1965-11-01), Van Dorsten
patent: 3283120 (1966-11-01), Spruck
patent: 3909611 (1975-09-01), Rauch

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