Electron beam instrument

Details Electron beam instrument Electron beam instrument

1984-11-05

1986-08-26

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396R, G01N 2300, H01J 326

Patent

active

046084916

ABSTRACT:
Under certain conditions, the electron beam from the electron gun of an electron microscope is deflected by deflecting means in such a way that the beam impinges on one point on a filmy crystalline specimen at a specific tilt angle while the direction of the tilt is rotated, to obtain an electron micrograph of the specimen. In the conventional astigmatism correcting device, however, the rotation of the direction of the tilt makes it impossible to correct the astigmatism of the objective lens of the microscope which forms such an electron micrograph. In the instrument according to the present invention, astigmatism correcting signals synchronized with the rotation of the direction of the tilt are supplied to the astigmatism correcting device so that the obtained electron micrograph may be unaffected by the astigmatism of the objective lens despite the periodic rotation of the direction of the tilt.

REFERENCES:
patent: 2973433 (1961-02-01), Kramer
patent: 3753034 (1973-08-01), Spicer
patent: 4044254 (1977-08-01), Krisch et al.
patent: 4214162 (1980-07-01), Hoppe et al.
Proceedings Electron Microscopy Society of America, forty-first annual meeting 1983, edited by G. W. Bailey, pp. 406-407.

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