Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-01-31
2006-01-31
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
Reexamination Certificate
active
06992290
ABSTRACT:
An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.
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Hatakeyama Masahiro
Karimata Tsutomu
Murakami Takeshi
Nagahama Ichirota
Nagai Takamitsu
Ebara Corporation
Gurzo Paul M.
Kabushiki Kaisha Toshiba
Lee John R.
Westerman Hattori Daniels & Adrian LLP
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