Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2006-10-17
2006-10-17
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S307000, C250S310000, C250S398000, C250S491100, C324S754120, C356S237600, C356S004050
Reexamination Certificate
active
07122796
ABSTRACT:
An inspection method and apparatus includes control of an acceleration voltage of an electron beam, irradiation of the electron beam to an object to be inspected mounted on a stage which is continuously moving at least in one direction, and detection of at least one of secondary electrons and reflected electrons emanated from the object in response to the irradiation. An image of the object is obtained from the detected electron by using positional information of the stage and inspection or measurement of the object is conducted using and obtained image. In the detection, an electric field in the vicinity of the object mounted on the stage is controlled so that at least one secondary electrons and the reflected electrons emanated from the object in response to the irradiation of the electron beam are decelerated.
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Hiroi Takashi
Kuni Asahiro
Matsuyama Yukio
Nozoe Mari
Shinada Hiroyuki
Antonelli, Terry Stout and Kraus, LLP.
Hashmi Zia R.
Hitachi , Ltd.
Lee John R.
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