Electron beam inspection apparatus

Details Electron beam inspection apparatus Electron beam inspection apparatus

2007-08-14

2007-08-14

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000

Reexamination Certificate

active

11099688

ABSTRACT:
An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.

REFERENCES:
patent: 5200677 (1993-04-01), Dueck et al.
patent: 6576919 (2003-06-01), Yoshida
patent: 6583414 (2003-06-01), Nozoe et al.
patent: 6657221 (2003-12-01), Nakagaki et al.
patent: 11-40631 (1999-02-01), None

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