Electron-beam image transfer device

Details Electron-beam image transfer device Electron-beam image transfer device

1982-05-18

1984-08-21

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504411, 2504421, 219121EL, H21J 3700

Patent

active

044672101

ABSTRACT:
An electron-beam image transfer device includes an evacuated vessel having a main chamber and spare chamber extended therefrom and a specimen holder and mask holder disposed in the main chamber. A subchamber is formed near the spare chamber to house a specimen. The specimen in the subchamber is transferred to the spare chamber by a movable support through an opening which is always kept in an airtight state, and then brought to the specimen holder by a transferring mechanism.

REFERENCES:
patent: 3430029 (1969-02-01), Hinrichs
patent: 3679497 (1972-07-01), Handy et al.
patent: 3756435 (1973-09-01), Steigerwald
patent: 4013262 (1977-03-01), Schott et al.

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