Electron beam focusing system for electron microscope

Details Electron beam focusing system for electron microscope Electron beam focusing system for electron microscope

1985-06-10

1986-12-02

Church, Craig E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, H01J 2946

Patent

active

046266895

ABSTRACT:
When a transmission-type electron microscope is used to make an observation of a diffraction image produced by a focused electron beam, it is desired that the divergence angle of the electron beam be varied at will while maintaining the spot diameter of the beam on a specimen constant. The present invention provides three stages of focusing lenses and a means for controlling these lenses in interrelated manner in a space between an objective lens and an electron gun in which the specimen is placed. The three stages of lenses are designed to be controlled independently. When an operation is performed to increase the divergence angle of the electron beam, the excitations of the first and second stages of focusing lenses are reduced while the excitation of the third stage of focusing lens is increased, thus maintaining the spot diameter of the beam on the specimen constant.

REFERENCES:
patent: 2457092 (1948-12-01), Simard et al.
patent: 3715582 (1973-02-01), Akahori et al.
patent: 4160162 (1979-07-01), Muller et al.
Introduction to Analytical Electron Microscopy, Edited by John J. Hren et al., Chapters 14 and 15.

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