Electron beam exposure apparatus for scanning electron microscop

Details Electron beam exposure apparatus for scanning electron microscop Electron beam exposure apparatus for scanning electron microscop

1997-05-15

1999-06-08

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3726

Patent

active

059106573

ABSTRACT:
An electron beam exposure apparatus for scanning electron microscopy, which includes a main control unit; an electron gun for emitting an electron beam; a deflection amplifier connected to the main control unit for outputting a drive signal for controlling deflection conditions of the electron beam; a secondary electron detector; an A/D converter selectively connected either the deflection amplifier or the secondary electron detector for generating a digital signal; an image memory connected to the A/D converter and selectively to the main control unit such that the main control checks outputs of the deflection amplifier in response to outputs of the image memory.

REFERENCES:
patent: 3854071 (1974-12-01), Heritage et al.
patent: 4752686 (1988-06-01), Brust
patent: 4807159 (1989-02-01), Komatsu et al.
patent: 5659174 (1997-08-01), Kaneoka et al.

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