Electron beam device having a specimen holder

Details Electron beam device having a specimen holder Electron beam device having a specimen holder

2006-10-10

2006-10-10

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S440110, C250S311000

Reexamination Certificate

active

07119344

ABSTRACT:
An electron beam device having a specimen holder, in particular for a transmission electron microscope (TEM), which makes it possible to identify the specimen holder in a simple manner is described. Therefore, the electron beam device has at least one specimen holder having at least one holding element for holding a specimen and at least one identification unit. Furthermore, the electron beam device has a reading unit for reading the identification unit without contact, a goniometer, into which the specimen holder may be inserted, and a controller for controlling the movement modes of the goniometer, via which the movement modes of the goniometer are controlled on the basis of the identification data supplied by the identification unit and of corresponding data stored in the controller.

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Euchner GmbH + Co. webpage (www.euchner.de) printout regarding Identsystem CIS3A Mini in German language and English language.
English language brochure (pp. 1-19) regarding Identsystem CIS3/CIS3A provided by Euchner GmbH + Co. on its webpage www.euchner.de.
Machine translation of JP 2002-216693 A (Reference AG).

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