Electron beam device and method for stereoscopic measurements

Details Electron beam device and method for stereoscopic measurements Electron beam device and method for stereoscopic measurements

2005-02-08

2005-02-08

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S307000

Reexamination Certificate

active

06852974

ABSTRACT:
An electron beam device according to the present invention is made up of an electron beam source for emitting an electron beam, an electron optical system for irradiating the electron beam onto a specimen, a specimen holder for holding the specimen, a specimen tilting section for producing relative tilt angles between the specimen holder and the electron beam, an electron beam detecting section for detecting electron beam emitted from the specimen, and a data correcting section for correcting the three-dimensional detection data to have specified relationship under the condition of a relative tilt angle between the specimen holder and the electron beam.

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“Medical and Biologcal Electron Microscopy,” Japanese Society of Electron Microscopy, pp. 278-299, Jan. 20, 1982.

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