Electron-beam device and detector system

Details Electron-beam device and detector system Electron-beam device and detector system

2004-01-13

2008-09-16

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000

Reexamination Certificate

active

07425701

ABSTRACT:
An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.

REFERENCES:
patent: 4812651 (1989-03-01), Feuerbaum et al.
patent: 4933552 (1990-06-01), Lee
patent: 5408098 (1995-04-01), Wells
patent: 5412209 (1995-05-01), Otaka et al.
patent: 5422486 (1995-06-01), Herrmann et al.
patent: 5466940 (1995-11-01), Litman et al.
patent: 5483065 (1996-01-01), Sato et al.
patent: 5510617 (1996-04-01), Troost et al.
patent: 5644132 (1997-07-01), Litman et al.
patent: 5872358 (1999-02-01), Todokoro et al.
patent: 5900629 (1999-05-01), Todokoro et al.
patent: 6498345 (2002-12-01), Weimer et al.
patent: 6847038 (2005-01-01), Todokoro et al.
patent: 2002/0011565 (2002-01-01), Volker Drexel et al.
patent: 2002/0185599 (2002-12-01), Kimura et al.
patent: 198 28 476 (1999-12-01), None
patent: 198 28 476 (1999-12-01), None
patent: 100 12 314 (2001-09-01), None
patent: 100 12 314 (2001-09-01), None
patent: 0 661 727 (1995-07-01), None
patent: 0 689 063 (1995-12-01), None
patent: 0 721 201 (1996-07-01), None
patent: 0 917 177 (1999-05-01), None
patent: 0 917 177 (1999-05-01), None
patent: 0 917 178 (1999-05-01), None
patent: 0 917 178 (1999-05-01), None
patent: 1 063 677 (2000-12-01), None
patent: 08-124513 (1996-05-01), None
patent: 08-273569 (1996-10-01), None
patent: WO 99/14785 (1999-03-01), None
Heiner Jaksch; “Field Emission Sem for true surface imaging and analysis”; reprinted from Materials World, Oct. 1996, (3 pages).
Supplemented Abstract for EP 0 917 178 A1 (Reference AK), included with IDS filed on Aug. 6, 2004.
“GEMINI field emission electron optics: core technology for the Leo Supra range,” available from <http://www.htskorea.com/product/leo/supra/gemini.pdf>.

Affiliated with

Also associated with

Rating

Electron-beam device and detector system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron-beam device and detector system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron-beam device and detector system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3984648