Electron beam device

Details Electron beam device Electron beam device

2008-02-15

2010-06-29

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S397000

Reexamination Certificate

active

07745787

ABSTRACT:
Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose.A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.

REFERENCES:
patent: 3626184 (1971-12-01), Crewe
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 5866905 (1999-02-01), Kakibayashi et al.
patent: 5981947 (1999-11-01), Nakasuji et al.
patent: 6051834 (2000-04-01), Kakibayashi et al.
patent: 7105816 (2006-09-01), Kamiya et al.
patent: 58-125352 (1983-08-01), None
patent: 6-139988 (1994-05-01), None
patent: 7-169429 (1995-07-01), None
patent: 07169429 (1995-07-01), None
patent: 7-335172 (1995-12-01), None
patent: 9-167591 (1997-06-01), None

Affiliated with

Also associated with

Rating

Electron beam device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4175520