Electron beam control device for electron microscopes

Details Electron beam control device for electron microscopes Electron beam control device for electron microscopes

1982-06-24

1984-05-29

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, 250396R, H01J 3726

Patent

active

044517378

ABSTRACT:
An electron beam control device for electron microscopes is disclosed in which various digital signals used for deflecting an electron beam are previously stored in a memory for each observation mode. When one of the observation modes is specified by a selector, one of the digital signals corresponding to the specified observation mode is read out from the memory to a digital-to-analog converter and is thereby converted into an analog signal.
The analog signal is supplied to electron beam deflectors to control the beam alignment.

REFERENCES:
patent: 3749964 (1973-07-01), Hirata
patent: 3757117 (1973-09-01), Muller et al.
patent: 3757120 (1973-09-01), Muller et al.
patent: 3801784 (1974-04-01), Wittry
patent: 3835403 (1974-09-01), Leinemann
patent: 4180738 (1979-12-01), Smith et al.

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