Electron beam control apparatus for use in transmission electron

Details Electron beam control apparatus for use in transmission electron Electron beam control apparatus for use in transmission electron

1988-02-03

1989-07-25

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250307, 250396R, H01J 3726

Patent

active

048516740

ABSTRACT:
An electron control beam apparatus. Previously stored in a memory are amounts of electron beam deflection and astigmatism correction for each of several electron beam probe diameters that may be selected. In accordance with the selected electron beam probe diameter adjustment is made of electron beam deflection due to the axis variation, etc. in a projection lens system and correction of astigmatism. Thus, even if the electron beam probe diameter is changed, the electron beam probe is projected on an unvaried or fixed position on a sample, thereby preventing the electron beam probe from slipping away or moving on an observation screen.

REFERENCES:
patent: 4162403 (1979-07-01), Baumgarten
patent: 4451737 (1984-05-01), Isakozawa
patent: 4608491 (1986-08-01), Kokubo
patent: 4724319 (1988-02-01), Shirota

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