Electron-beam biprism

Details Electron-beam biprism Electron-beam biprism

1996-09-12

1998-09-22

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, H01J 3700

Patent

active

058118063

ABSTRACT:
There is disclosed an electron-beam biprism for use in an electron-beam holographic interference microscope. The biprism comprises a rotary plate having a hole permitting passage of an electron beam, a biprism wire mounted to the rotary plate and electrically insulated from the rotary plate, a holder, a rotating mechanism, a heating mechanism for heating the biprism wire, a voltage source for applying a voltage to the biprism wire, and a pair of grounding electrodes extending parallel to the biprism wire which bridges across the hole. The rotary plate is rotatably held by the holder so as to be rotatable about the hole. The grounding electrodes are mounted to the rotary plate. The biprism wire is sandwiched between the grounding electrodes.

REFERENCES:
patent: 4133702 (1979-01-01), Krimmel
patent: 4935625 (1990-06-01), Hasegawa et al.
patent: 4998788 (1991-03-01), Oskakabe et al.
patent: 5192867 (1993-03-01), Osakabe et al.
patent: 5466548 (1995-11-01), Matsui
"Anti-Contamination Electron Biprism for Electron Holography", Ken Harada et al., J. Electron Microsc., vol. 37, No. 4, pp. 199-201, 1988.

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