Electron beam array write head system and method

Details Electron beam array write head system and method Electron beam array write head system and method

2005-05-10

2005-05-10

Lee, John R. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C250S42300F, C250S492100, C313S336000, C315S366000

Reexamination Certificate

active

06891169

ABSTRACT:
An e-beam system generates a set of massively parallel beams of order of magnitude 1,000 by employing a flash eprom to store calibration data and to receive on/off signals directed through the address system of the memory array, the individual electron sources being mounted above the memory array in a geometric array that tracks the structure of the memory array.

REFERENCES:
patent: 5363021 (1994-11-01), MacDonald
patent: 5892231 (1999-04-01), Baylor et al.

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