Electron beam apparatus with dynamic focussing

Details Electron beam apparatus with dynamic focussing Electron beam apparatus with dynamic focussing

1989-10-06

1991-03-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

2504401, 2504421, 250310, G21K 510

Patent

active

050031732

ABSTRACT:
Notably for transmission measurements, an electron microscope utilizes a dynamic focussing imaging optical system so that the focussing is optimally adjusted according to scanning lines even when measurements are performed on tilted objects. To this end, the object is preferably scanned in a pattern of lines extending parallel to an object tilt axis. Any defocussing of the electron beam, occurring at the irradiating side due to the dynamic focussing, can also be instantaneously corrected.

REFERENCES:
patent: 3629577 (1971-12-01), Weber et al.
patent: 3702399 (1972-11-01), Lucas
patent: 4170737 (1979-10-01), Bobrov et al.
patent: 4306149 (1981-12-01), Le Poole et al.
patent: 4393310 (1983-07-01), Hahn
patent: 4661968 (1987-04-01), Wondergem

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