Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2008-05-13
2010-11-02
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S310000, C250S311000, C250S3960ML, C250S3960ML, C250S492200
Reexamination Certificate
active
07825377
ABSTRACT:
An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and the operation of each of the aberration corrector, a condenser lens, and the like is controlled such that the object point of an objective lens does not change in either of the scan modes. If a comparison is made between the secondary electron images of a specimen in the two modes, the image scaling factor and the focus remain unchanged and evaluation and adjustment can be performed by distinctly recognizing only the effect of the aberration corrector. This reduces the time required to adjust an optical axis which has been long due to an axial alignment defect inherent in the aberration corrector and an axial alignment defect in a part other than the aberration corrector which are indistinguishably intermingled with each other.
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Kawasaki Takeshi
Ose Yoichi
Todokoro Hideo
Yoshida Takaho
Hitachi High-Technologies Corporation
Marquez, Esq Juan Carlos A.
Stites & Harbison PLLC
Wells Nikita
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