Electron beam apparatus for work function measurements

Details Electron beam apparatus for work function measurements Electron beam apparatus for work function measurements

2007-03-13

2009-02-24

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S3960ML, C250S397000, C250S491100, C250S492200

Reexamination Certificate

active

07495216

ABSTRACT:
The inventive apparatus measures workfunction values using deflection of an electron beam without direct contact of the electron beam with the sample surface. The apparatus, mounted within a vacuum chamber, includes an electron gun, a position sensitive electron detector, and a sample. The sample is located such that an electron beam emanating from the gun can approach the surface and then be deflected into the position sensitive electron detector. Workfunction values are then derived from a measured deflected-electron position distribution.

REFERENCES:
patent: 6627903 (2003-09-01), Hirayanagi
patent: 7015467 (2006-03-01), Maldonado

Affiliated with

Also associated with

Rating

Electron beam apparatus for work function measurements does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam apparatus for work function measurements, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam apparatus for work function measurements will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4094470