Electron beam apparatus for measuring a voltage of a sample

Details Electron beam apparatus for measuring a voltage of a sample Electron beam apparatus for measuring a voltage of a sample

1994-11-18

1996-05-14

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, H01J 3710

Patent

active

055170285

ABSTRACT:
An electron beam apparatus comprises, inside of an objective lens for focussing a primary electron beam e1 and irradiating it on a sample surface, a secondary electron energy analyzer having a retarding mesh electrode for analyzing the energy of a secondary electron e2 emitted from a point on the sample surface at which the primary electron beam e1 is irradiated. The secondary electron energy analyzer comprises a collimation unit for forming one or more electrostatic lenses by a nonuniform electrical field distribution and for having an electrostatic lens collimate the trajectory of a secondary electron e2 for its injection into a retarding grids (mesh electrode). The collimation unit comprises at least three cylindrical electrodes positioned between the sample surface and the retarding grid (mesh electrode) and numbered first, second and third from the one closest to the sample surface. An external power supply module applies an appropriate voltage to each of these cylindrical electrodes for having each duo of neighboring cylindrical electrodes form an electrostatic lens.

REFERENCES:
patent: 4766372 (1988-08-01), Rao
patent: 4812651 (1989-03-01), Feuerbaum et al.
patent: 4982091 (1991-01-01), Garth et al.
patent: 4983830 (1991-01-01), Iwasaki

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