Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-06-25
2010-06-29
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000
Reexamination Certificate
active
07745784
ABSTRACT:
The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.
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Hamashima Muneki
Karimata Tsutomu
Kihara Naoto
Kimba Toshifumi
Murakami Takeshi
Ebara Corporation
Ippolito Rausch Nicole
Vanore David A
Westerman Hattori Daniels & Adrian LLP
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