Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-09-09
2008-09-09
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S3960ML, C250S492300, C356S237100, C315S382000
Reexamination Certificate
active
11528673
ABSTRACT:
The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.
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Hamashima Muneki
Hatakeyama Masahiro
Karimata Tsutomu
Kato Takao
Kimba Toshifumi
Ebara Corporation
Johnston Phillip A.
Vanore David A.
Westerman, Hattori, Daniels & Adrian , LLP.
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