Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2011-08-30
2011-08-30
Nguyen, Kiet T (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
Reexamination Certificate
active
08008622
ABSTRACT:
High-contrast exposure is performed by use of a small dose of electron beams, a pattern is formed on a wafer with high accuracy, and high-precision inspection is performed. In pattern formation, proximity effect correction processing is performed. Moreover, exposure of electron beams is performed based on a result of filtering using an inverse characteristic of exposure characteristics of the electron beams. Furthermore, in pattern inspection, electron beams are irradiated based on a result of filtering for obtaining a peripheral region of an edge of the pattern formed.
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Ando Kimiaki
Fujita Ryo
Inoue Yuji
Muraki Masato
Yoda Haruo
Antonelli, Terry Stout & Kraus, LLP.
Canon Inc.
Hitachi High-Technologies Corporation
Nguyen Kiet T
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