Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-02-17
2008-10-14
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C174S381000, C341S015000
Reexamination Certificate
active
07435958
ABSTRACT:
A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
REFERENCES:
patent: 3911321 (1975-10-01), Wardly
patent: 3927321 (1975-12-01), Welter
patent: 4310764 (1982-01-01), Iijima
patent: 5044001 (1991-08-01), Wang
patent: 5468522 (1995-11-01), Honkura et al.
patent: 6232787 (2001-05-01), Lo et al.
patent: 6252412 (2001-06-01), Talbot et al.
patent: 6300755 (2001-10-01), Elmer et al.
patent: 6667476 (2003-12-01), Todokoro et al.
patent: 6670547 (2003-12-01), Kageyama
patent: 6872944 (2005-03-01), Todokoro et al.
patent: 6936981 (2005-08-01), Gesley
patent: 7015467 (2006-03-01), Maldonado et al.
patent: 7030376 (2006-04-01), Inanobe et al.
patent: 7112803 (2006-09-01), Petrov et al.
patent: 7161162 (2007-01-01), Maldonado et al.
patent: 2002/0178562 (2002-12-01), Aoki et al.
patent: 61-059825 (1986-03-01), None
patent: 61059825 (1986-03-01), None
patent: 11-342437 (1999-12-01), None
patent: 2001-027505 (2001-01-01), None
patent: 2002-361441 (2002-12-01), None
Inanobe Tsuyoshi
Ose Yoichi
Sasada Katsuhiro
Takami Sho
Dickstein & Shapiro LLP
Hitachi High-Technologies Corporation
Vanore David A.
LandOfFree
Electron beam apparatus and method for production of its... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electron beam apparatus and method for production of its..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam apparatus and method for production of its... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3993011