Electron beam apparatus and method for manufacturing...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S307000, C250S441110, C250S442110

Reexamination Certificate

active

11247263

ABSTRACT:
A sample chamber and a column are connected to each other and comprise a magnetic substance. An exhaust section controls a pressure in the sample chamber and the column. A stage controller controls a stage, above which a sample is placed, in the sample chamber. An electron beam source power supply supplies power to an electron beam source, which emits an electron beam to the sample. A power supply supplies voltage to electron optic system, which controls the electron beam. The sample chamber, exhaust section, stage controller, electron beam source power supply and power supply are grounded by a first, second, third, fourth and fifth grounding point, respectively. The electron beam source and the electron optic system are electrically insulated from the sample chamber, column, exhaust section and stage. One of the first, second and third grounding point is different from the fourth or fifth grounding point.

REFERENCES:
patent: 3636346 (1972-01-01), Akahori et al.
patent: 6653629 (2003-11-01), Tanaka et al.
patent: 2002/0038852 (2002-04-01), Suzuki
patent: 2003/0201391 (2003-10-01), Shinada et al.
patent: 2-65044 (1990-03-01), None
patent: 2004-2993504 (1999-10-01), None
Official Action issued by the German Patent Office on Apr. 25, 2007, for German Patent Application No. 10 2005 049 066.2-54, and English-language translation thereof.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Electron beam apparatus and method for manufacturing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam apparatus and method for manufacturing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam apparatus and method for manufacturing... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3935388

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.