Electron beam apparatus and method for manufacturing...

Details Electron beam apparatus and method for manufacturing... Electron beam apparatus and method for manufacturing...

2008-05-13

2008-05-13

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S441110, C250S442110

Reexamination Certificate

active

11247263

ABSTRACT:
A sample chamber and a column are connected to each other and comprise a magnetic substance. An exhaust section controls a pressure in the sample chamber and the column. A stage controller controls a stage, above which a sample is placed, in the sample chamber. An electron beam source power supply supplies power to an electron beam source, which emits an electron beam to the sample. A power supply supplies voltage to electron optic system, which controls the electron beam. The sample chamber, exhaust section, stage controller, electron beam source power supply and power supply are grounded by a first, second, third, fourth and fifth grounding point, respectively. The electron beam source and the electron optic system are electrically insulated from the sample chamber, column, exhaust section and stage. One of the first, second and third grounding point is different from the fourth or fifth grounding point.

REFERENCES:
patent: 3636346 (1972-01-01), Akahori et al.
patent: 6653629 (2003-11-01), Tanaka et al.
patent: 2002/0038852 (2002-04-01), Suzuki
patent: 2003/0201391 (2003-10-01), Shinada et al.
patent: 2-65044 (1990-03-01), None
patent: 2004-2993504 (1999-10-01), None
Official Action issued by the German Patent Office on Apr. 25, 2007, for German Patent Application No. 10 2005 049 066.2-54, and English-language translation thereof.

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